Rodney C. Smedt

Nanometrics, Inc. engages in the production of process control metrology and inspection systems used in the fabrication of semiconductors and other solid-state devices. The firm operates through the following geographical segments: South Korea; China; Singapore; United States; Taiwan; Japan; and Others. Its products and solutions include semiconductor; data storage; advanced packaging; HB-LED; solar photovoltaic; and product upgrades. The company was founded by Vincent J. Coates in 1975 and is headquartered in Milpitas, CA.

Therma-Wave, Inc. develops and markets control metrology systems. Its products are used in the manufacture of semiconductors. The company offers products for the measurement of transparent, semitransparent and opaque thin films for the monitoring of ion implantation, as well as for the integration of metrology into semiconductor processing systems.Therma-Wave was founded in 1982 by Allan Rosencwaig and David Willenborg and is located in Fremont, CA

ReVera, Inc. provides materials metrology solutions for advanced semiconductor processing. Its products include VeraFlex III XF an inline metrology for film composition and thickness control, VeraFlex II standard for HKMG production metrology and QED an offline advanced data analysis and recipe creation and maintenance system. The company was founded in 2004 and is headquartered in Santa Clara, CA.

Part of KLA Corp., Sensys Instruments Corp develops integrated metrology systems for the semiconductor industry. The company is based in Santa Clara, CA. Sensys Instruments was acquired by Therma-Wave, Inc., part of KLA Corp. from May 28, 2007 on January 17, 2002 for $72.62 million.